Manufacturer：SEMILAB
Model：LEI1510EC
Performance specification:
Wafer size：2“ to 8”Manual loadingMapping：up to 300 measurement pointsAutomatic drift compensationSoftware selectable resistivity rangesLinearity 0.035~3000 Ω/□ < ± 3%
Wafer size：2“ to 8”
Manual loading
Mapping：up to 300 measurement points
Automatic drift compensation
Software selectable resistivity ranges
Linearity 0.035~3000 Ω/□ < ± 3%