Manufacturer：Semimap
Model：COREMA-ER
Performance specification:
150mm×150mm Stage and 150mm dia. ChuckResistivity: 1E5 - 1E12 ohm-cm Fast, 1% Repeatability measurement range: GaAs(1E6-1E9 ohm-cm) SiC 1E5-1E12 ohm-cmNon-Destructive MeasurementNo Sample Preparation Up to 200mm Wafer Size
150mm×150mm Stage and 150mm dia. Chuck
Resistivity: 1E5 - 1E12 ohm-cm Fast, 1% Repeatability
measurement range: GaAs(1E6-1E9 ohm-cm) SiC 1E5-1E12 ohm-cm
Non-Destructive Measurement
No Sample Preparation
Up to 200mm Wafer Size