Wafer chuck 6 inch
532nm laser,CW,50mW
Front illuminated TE cooled CCD, 200-1100nm
TE cooled extended InGaAs PD array, 900-1700nm
Fast scan: 4”wafer mapping with 0.5mm resolution needs 184s,with 2mm resolution 19s only
Minimum spatial resolution:100μm
Edge (2-3mm) scan and dual resolution scan mode
Cryogenic accessories