Step Profiler

Manufacturer：KLA-Tencor

Model：P-7

Performance specification:

9.5-inch square stage or 300 mm sample chuck.

highest  scan length 200 mm and 1mm Z range.

 maximum 4 million sampling points

Resolution: 0.01Å(13μm mode) and < 0.20 Å (327 μm mode)

Repeatability: 4Å @ 1μm specimen w/o shock absorption stage