Manufacturer：VINCENT
Model：HBM-800G
Performance specification:
highest temperature：1400℃Temperature uniformity： ±5℃ with nine pointVacuum 1E-3Torr，leak rate： 5E-8 atm.cc/secMaximum ramping rate 12℃/minMaximum damping rate from 1400℃ to 60℃ in180min
highest temperature：1400℃
Temperature uniformity： ±5℃ with nine point
Vacuum 1E-3Torr，leak rate： 5E-8 atm.cc/sec
Maximum ramping rate 12℃/min
Maximum damping rate from 1400℃ to 60℃ in180min
Decomposed the epitaxial coating on graphite susceptor when heated under nitrogen or maxing gas atmosphere