Manufacturer：Environment Protection Technology
Model：CEZD-200D
Performance specification:
Two columns with 200L per columnMaximum treatment 200slm per columnsafety interlock with pressure and temperature
Two columns with 200L per column
Maximum treatment 200slm per column
safety interlock with pressure and temperature
This dry scrubber system could absorb the waste gas of arsine and phosphine exhaust from GaAs/InP MOCVD.