Wet scrubber-ZK Nanotech ZJG Institute of Compound Semiconductors

Wet scrubber

Manufacturer：I.E.M.Technologies

Model：Constellation 2.4

Performance Specification:

the highest total gas flow: 1000L/min

the waste gas of four MOCVDs could be treated at the same time

the ability to deal with 10L/min phosphine and 2L/min arsine.

The treated gas meets the safety emission standard

Introduction

Constellation 2.4 scrubber system could deal with the waste gas of arsine and phosphine from GaAs/InP MOCVD.

Based on the principle of chemical reaction, the toxic waste gas of arsine and phosphine with is removed by chemical reaction and the reaction equation is as follows:

AsH3 + 4NaClO+3NaOH = Na3AsO4 + 4NaCl + 3H2O

PH3 + 4NaClO+3NaOH = Na3PO4 + 4NaCl + 3H2O