Close Coupled Showerhead-ZK Nanotech ZJG Institute of Compound Semiconductors

Close Coupled Showerhead

Manufacturer：Aixtron

Model：CCS

Performance specification:

Proven Close Coupled Showerhead®

- True scaling from R&D to mass production

- Inherently uniform and reproducible growth for all material systems – focus your effort on material and device development

- High flexibility in process window for excellent material quality and uniformity

Ideal for small R&D budgets: lowest running cost

- Low gas flows and high precursor efficiency

- Easy and low cost maintenance

Available applications

- GaN, InP, GaAs, InSb, GaInNAs, II-VI, for others please talk to us!

Available configurations - 3 x 2 inch, 1 x 4 inch, 1 x 3 inch, 1 x 2 inch – by simple carrier exchange

- 6 x 2 inch, 3 x 3 inch, 1 x 6 inch – by simple carrier exchange

Numerous customer references worldwide!

Introduction

With Close Coupled Showerhead technology, the process-relevant gases are introduced into the reactor through the water-cooled showerhead surface across the entire coating surface. The distance between the showerhead and the substrates is very small. The gas inlet is designed so that the individual gases are separated by many narrow tubes up to just before the inlet. The gases are introduced into the reactor through separate openings in the water-cooled showerhead to achieve a very even distribution of the process gases.